Alicona MeX

MeX turns any SEM into a optical 3D measuring system

MeX is a stand alone software package that turns any SEM with digital imaging into a true surface metrology device.

Using stereoscopic images the software automatically retrieves 3D information and presents a highly accurate, robust and dense 3D dataset. This device allows you to perform traceable metrology examinations.

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Specifications

Why Choose MeX?

  • Results obtained irrespective of SEM magnification
  • Metrology results at macro and micro levels
  • No additional hardware needed
  • Turns any SEM into a true surface metrology device
  • AutoCalibration routine refines calibration data
  • Product Highlights

  • Profile-form measurement
  • Profile-roughness measurement
  • Surface texture measurement
  • Volume measurement
  • 2D image analysis
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